Gas Detection for Semiconductor Manufacturing Plants | RKI Instruments
Gas Detection for Semiconductor Manufacturing Plants
RKI Instruments offers an extensive line of gas detection alarm systems for use in semiconductor manufacturing plants.
With the growth of the semiconductor market, RKI’s partner, RIKEN KEIKI, has developed over 600 types of gas sensors covering new and desired target gases (principle × gas × concentration). The long-selling GD-70D has a lineup of more than 260 types, supporting detection of a variety of gases. The only manufacturer that can comply with TLV-TWA 5ppm COS. GD-70D product information
GD-70D Gas Detector
Can be used in all manner of semiconductor manufacturing processes.
Custom-ordered sensor development and sensitivity surveys are also possible.
Even if you require a gas type or detection range that is not in our sensor lineup, gas sensitivity survey using existing sensors is possible. This enables us to provide custom-made sensors for our customers.
Since gas sensitivity surveys are essentially free*, please feel free to contact us, although it is for a pilot lines or just a single-line to small start.
FPM-80A Multi-Point Toxic Gas Detection System
FPM-80A detects toxic gases simultaneously up to 80 points in a single unit, also providing a significant reduction in operating and maintenance costs by supporting safe and stable plant operations with high reliability gas detection and less downtime. FPM-80A product information
High reliability and non-stop operation
Powerful pumps makes gas detection up to 120m (400 ft) distance only within 1 minute.
Hot swap for power-supply units, pumps, and PCs to make maximum capacity and minimum downtime at every Fab.
User friendly operation
Easy-to-read and easy-to-operate touch panel
Long-life gas detection tape cassette
Long life & cassette tape type provides significant reduction in maintenance frequency
180 days tape is the longest lifetime
Cassette tape type provides anyone with easy replacement which takes only within 1 minute.
Cassette tape type is the best solution to avoid any tape problems such as tape twisting and tape jams.
Smart management function to monitor the status remotely from higher level
Available for various communication protocols.
Gas tracer function leads to immediate checks without going on site.
Cassette tape type with RFID tag leads to check the rest of tape life.
Riken Keiki’s long-awaited FPM-80A is the flagship model, incorporating the technology of Japan’s top-share manufacturer. Equipped with three key components—pump, power supply, and data—it supports continuous operation in semiconductor manufacturing lines. For managers concerned about “downtime risks” in existing detection systems, we encourage you to review the detailed specifications of the FPM-80A
Transportable gas detector
Transportable gas detectors are compact and can be used to detect gas wherever a commercial power outlet is available.
Portable (Personal) detectors enhance workplace safety when worn by workers. They are also suitable for safety management with objective numerical values, from checking residual gas before maintenance, securing safety during work and checking the seal status of piping joints (unions). In the event of a gas leak, they can also be used to identify where the leakage is from.
RKI Instruments offers an extensive line of gas detection alarm systems for use in semiconductor manufacturing plants.
With the growth of the semiconductor market, RKI’s partner, RIKEN KEIKI, has developed over 600 types of gas sensors covering new and desired target gases (principle × gas × concentration). The long-selling GD-70D has a lineup of more than 260 types, supporting detection of a variety of gases. The only manufacturer that can comply with TLV-TWA 5ppm COS. GD-70D product information
FPM-80A detects toxic gases simultaneously up to 80 points in a single unit, also providing a significant reduction in operating and maintenance costs by supporting safe and stable plant operations with high reliability gas detection and less downtime. FPM-80A product information
Long-life gas detection tape cassette
Transportable gas detector
Portable (Personal) detectors enhance workplace safety when worn by workers. They are also suitable for safety management with objective numerical values, from checking residual gas before maintenance, securing safety during work and checking the seal status of piping joints (unions). In the event of a gas leak, they can also be used to identify where the leakage is from.