Overview

High reliability and non-stop operation
- Powerful pumps makes gas detection up to 120m (400 ft) distance only within 1 minute.
- Hot swap for power-supply units, pumps, and PCs to make maximum capacity and minimum downtime at every Fab.
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Overview

High reliability and non-stop operation
Specifications
| Model | FPM-80A |
|---|---|
| Detection principle | Chemical Tape Method |
| Detected gases | Toxic gases (see list of gases to be detected) |
| Display | 19 inch touch panel (contents: gas name, gas concentration, days remaining on tape, flow rate, etc.) |
| Detection tape replacement cycle | 180 days (The maximum tape replacement interval for NO₂ is 60 days.) |
| Detection point | Up to 80 points |
| Detection method | Pump suction type (1 pump per rack (Max. 8 points)) |
| Sampling flow rate | 2.5 L/min (per point) |
| Sampling distance | Up to 120 m (Approx. 400 ft.) |
| Sampling piping | OD φ6.35 mm (1/4 inch)× ID φ4.35 mm, PTFE tube |
| Exhaust line piping | OD φ10.0 mm ×ID φ8.0 mm, Gas-out integration : (undecided: inner tube) |
| Exhaust line distance | Max. 15 m (49 ft) |
| Alarm Setpoint | See list of gases to be detected |
| Gas Alarm Type | 2-stage alarm (H-HH) |
| Gas Alarm Operation | Auto reset or self-latching |
| Trouble alarm・Self diagnosis | System error / Sensor error / Flow rate error / Communication error / Tape replacement notice |
| Trouble alarm indication | Color display (orange)/contents on touch panel |
| Trouble alarm action | Auto reset or self-latching |
| Functions | Alarm trend display/event history display/alarm test (communicated to host system side) |
| Power cable | CVV and other cables, 3-core |
| 100 VAC AWG10 (5.5 mm2) or more, 220 VAC AWG14 (2.0 mm2) or more | |
| Power supply | Single phase three-wire VAC100V to 240V±10%・50/60Hz |
| Current consumption (max) | 100 VAC:23.0 A 240 VAC:9.6 A |
| Power consumption(max) | 80 points Normal specification: 1.0 kVA, Pyrolyzer specification: 2.3 kVA* |
| Initial clear | Normal specification: 3min, Pyrolyzer specification: 30 min* |
| Tape storage | Storage conditions: Stored in a refrigerator (10℃or below) / Storage period: 6 months |
| Operating temperature | +5℃ to 35℃(no sudden changes) |
| Operating humidity | 30 to 60 %RH (no condensation) |
| Usage altitude | Less than 2,000 m (6562 ft) above sea level |
| Pollution Degree | Level 2 |
Sensor List
| Tape model | FML-202E | FM-024E | FM-025E | |||||||
|---|---|---|---|---|---|---|---|---|---|---|
| Gas group | Hydride-1 | Hydride-2 | Hydride-3 | Hydride-4 | Ammonia | NO₂ | ||||
| Gas | PH₃ | H₂S | AsH₃ | SiH₄ | B₂H₆ | AsH₃ | H₂Se | GeH₄ | NH₃ | NO₂ |
| F.S. | 1500 | 20.0 | 150 | 30.0 | 1000 | 15.0 | 500 | 2000 | 150 | 30 |
| Display Unit | ppb | ppm | ppb | ppm | ppb | ppb | ppm | ppb | ppm | ppm |
| 1st alarm | 300 | 1.0 | 50 | 5.0 | 100 | 5.0 | 50 | 200 | 25.0 | 3.0 |
| 2nd alarm | 600 | 2.0 | 100 | 10.0 | 200 | 10.0 | 100 | 400 | 50.0 | 6.0 |
| Zero suppression (LDL) | 30 | 0.2 | 6 | 0.2 | 20 | 1.4 | 15 | 20 | 5.0 | 0.1 |
| 1 digit | 1 | 0.1 | 1 | 0.1 | 10 | 0.1 | 1 | 10 | 0.1 | 0.1 |
| Measuring Cycle / sec | 30 | 30 | 60 | 60 | 60 | 180 | 120 | 300 | 20 | 60 |
| Gas group | Mineral acid | Oxidizer | Pyrolyzer-1 | Pyrolyzer-2 | |||||
|---|---|---|---|---|---|---|---|---|---|
| Gas | HF | HBr | HCl | Cl₂ | F₂ | ClF₃ | NF₃ | C₅F₈ | C₄F₆ |
| F.S. | 20.0 | 20.0 | 15.0 | 3200 | 3000 | 3000 | 40 | 5.0 | 5.0 |
| Display Unit | ppm | ppm | ppm | ppb | ppb | ppb | ppm | ppm | ppm |
| 1st alarm | 3.0 | 2.0 | 2.0 | 500 | 500 | 500 | 10 | 2.0 | 2.0 |
| 2nd alarm | 6.0 | 4.0 | 4.0 | 1000 | 1000 | 1000 | 20.0 | 4.0 | 4.0 |
| Zero suppression (LDL) | 0.4 | 0.3 | 0.2 | 30 | 40 | 60 | 0.5 | 0.2 | 0.2 |
| 1 digit | 0.1 | 0.1 | 0.1 | 10 | 10 | 10 | 0.1 | 0.1 | 0.1 |
| Measuring Cycle / sec | 20 | 20 | 20 | 20 | 20 | 20 | 20 | 20 | 20 |
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