by Fmeaddons

High Sensitivity Toxic Gas Monitor for Octafluorocyclopentene, Perfluorobutadiene, or Hexafluoropropylene

Features

  • Ideal for monitoring semiconductor fab clean rooms
  • Ideal for low gas concentration
  • Minimal interference from solvents such as Fluorinert and Galden
  • Easily replaceable plug-in tape cassette
  • Cassette tape remainder display included
Category:

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Description

This model is a highly sensitive C5F8 / C4F6 / or C3F6 gas monitor which uses a special techniquie for detecting C5F8, C4F6 or C3F6. into more readily detectable compounds.

Then, the resulting compounds cause a chemical reaction on a colorimetric tape, and the intensity of the chemical reaction is analyzed and correlated to a specific ppm level of C5F8, C4F6 or C3F6 present in the sample. The detection tape is in a handy cassette which is easily removed for periodic replacement.

Application

Applications

  • Environmental Monitoring
  • Semiconductor Fabs
  • Manufacturing
  • Detecting uncaptured gas from scrubber

Specifications

Model

FP-260AGZS

Structure Desktop type, transportable

Detection principle

Special pyrolyzer + Photoelectric photometry method using tape cassette

Detection tape

Plug in cassette

Detection cycle

20 seconds

Measuring gas and range

see table above

Accuracy

Within +/- 20% +1 of indication

Tape operation time

1 month (for gas free condition) Tape remainder display and caution display for end of tape.

Sampling method

Automatic sampling (1 l/min) with internal pump

Gas Concentration readout

Direct reading with digital display

Alarm Preset Levels

Warning: 2.0ppm, Alarm 4.0ppm

Alarm Accuracy

Better than +/- 30% +1 digit of alarm setting value at constant condition

Alarm Display

Warning: Blinking yellow light
Alarm: Blinking red light
(steady light after restart)

Relay Contact

Latched mode (standard) or non-latched mode (optional). Form C (dry contacts) for both warning and alarm.
Rated 0.5A at 125VAC.

Alarm functions

Latching (standard) or self reset. Lamp (Caution: Yellow, Warning: Red) and buzzer

Self diagnosis

Sensor failure, low flow, tape failure, tape cut, tape replacement, tape end, tape failure, tape set failure, system trouble, motor trouble. Output: Form C, dry contacts
non-latched mode, rated 0.5A at 125VAC

External output signal

4-20mA DC (0-1V DC optional)
BL-NET (optional)

Operating temperature & humidity

10~35°C, 30~60% RH (non condensing)

Gas Inlet

Outer diameter: 6mm, with fitting for PTFE tubing

Power supply & power

110VAC, 110 VAC, 115VAC, 220VAC (80VA)

Dimensions & weight

Approx. 275(W) x 220(H) x 370(D)mm
Approx. 12 kg

Standard Accessories

Gas detection cassette tape, Dust filter, Fuse (3A)

Gases

Gas

Detection Range
Resolution
Warning
Alarm
Detection Cycle
Tape No.

C5F8

0~5.0ppm
0.1ppm
2.0ppm
4.0ppm
20 sec
FV-017

C4F6

0-5ppm
0.1ppm
2.0ppm
4.0ppm
20 sec
FV-017

C3F6

0~3.0ppm
0.1ppm
0.9ppm
2.0ppm
20 sec
FV-117

Download

Click Here For Download pdf File

Datasheet