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Photoelectron Spectrometer
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Home | Fixed Systems | GD-SK34PN

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Sensor/Transmitter For Silane & Silane Particulates GD-SK34PN

Features
  • Fast Response
  • Low power built-in pyrolyzer
  • Pyrolyzer and sensor as one unit
  • Self diagnostics on pyrolyzer
  • 4-20 mA output
  • Built-in sampling pump
  • Ionization detector (used for TEOS)
  • Virtually no organic solvent interference (TEOS)
  • Electrochemical sensor (used for NF3)
Applications
  • Semiconductor
  • Chemical Processing
  • Laboratory
  • Manufacturing


To accurately monitor Silane gas there are actually two gases that have to be detected. Silane gas can be present both in the state of its raw gas (SiH4) and in the state of particulates (SiO2) after oxidation (combustion) when it leaks into the air.

Accurate Silane gas monitoring can be assured by the GD-SK34PN's unique dual detection system. This dual detection system contains a highly reliable electrochemical sensor method for the raw Silane gas and a new type of ion detection method for the Silane particulates, silicon dioxide (SiO2), which is the residual particulate gas remaining after Silane spontaneously combusts with air.


Model
GD-SK34PN
Detectable Gas Silane (SiH4) in air Silicon Dioxide (SiO2) in air
Detection Principle Electrochemical cell Dual ionization chamber
Detection Range 0 - 15 ppm Above 10 mg. / m3
Signal Transmission Method 4-20 mA (2 core cable) ON / OFF transmission (Contact closure)
Sampling Method
Sample - drawing type (sample flow rate 500 cc / min.)
Power Requirement Pump: 100 VAC or 117 VAC
Indicator / alarm unit: 24 VDC + / - 10%
Operating Conditions 0 ~ 40 C, 35 ~ 90% RH
Warranty One year materials and workmanship



Specifications subject to change without notice.
Made in the USA

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