High Sensitivity Toxic Gas Monitor for Octafluorocyclopentene, Perfluorobutadiene, or Hexafluoropropylene

Datasheet

This model is a highly sensitive C5F8 / C4F6 / or C3F6 gas monitor which uses a special techniquie for detecting C5F8, C4F6 or C3F6. into more readily detectable compounds.

Then, the resulting compounds cause a chemical reaction on a colorimetric tape, and the intensity of the chemical reaction is analyzed and correlated to a specific ppm level of C5F8, C4F6 or C3F6 present in the sample. The detection tape is in a handy cassette which is easily removed for periodic replacement.

Features

Ideal for monitoring semiconductor fab clean rooms
Ideal for low gas concentration
Minimal interference from solvents such as Fluorinert and Galden
Easily replaceable plug-in tape cassette
Cassette tape remainder display included

Applications

Environmental Monitoring
Semiconductor Fabs
Manufacturing
Detecting uncaptured gas from scrubber

Detectable Gases and Detection Ranges

Gas	Detection Range	Resolution	Warning	Alarm	Detection Cycle	Tape No.
C5F8	0~5.0ppm	0.1ppm	2.0ppm	4.0ppm	20 sec	FV-017
C4F6	0~150ppb	0.1ppm	2.0ppm	4.0ppm	20 sec	FV-017
C3F6	0~3.0ppm	0.1ppm	0.9ppm	2.0ppm	20 sec	FV-117

Specifications

Model	FP-260AGZS
Structure	Desktop type, transportable
Detection principle	Special pyrolyzer + Photoelectric photometry method using tape cassette
Detection tape	Plug in cassette
Detection cycle	20 seconds
Measuring gas and range	see table above
Accuracy	Within +/- 20% +1 of indication
Tape operation time	1 month (for gas free condition) Tape remainder display and caution display for end of tape.
Sampling method	Automatic sampling (1 l/min) with internal pump
Gas Concentration readout	Direct reading with digital display
Alarm Preset Levels	Warning: 2.0ppm, Alarm 4.0ppm
Alarm Accuracy	Better than +/- 30% +1 digit of alarm setting value at constant condition
Alarm Display	Warning: Blinking yellow light Alarm: Blinking red light (steady light after restart)
Relay Contact	Latched mode (standard) or non-latched mode (optional). Form C (dry contacts) for both warning and alarm. Rated 0.5A at 125VAC.
Alarm functions	Latching (standard) or self reset. Lamp (Caution: Yellow, Warning: Red) and buzzer
Self diagnosis	Sensor failure, low flow, tape failure, tape cut, tape replacement, tape end, tape failure, tape set failure, system trouble, motor trouble. Output: Form C, dry contacts non-latched mode, rated 0.5A at 125VAC
External output signal	4-20mA DC (0-1V DC optional) BL-NET (optional)
Operating temperature & humidity	10~35°C, 30~60% RH (non condensing)
Gas Inlet	Outer diameter: 6mm, with fitting for PTFE tubing
Power supply & power	110VAC, 110 VAC, 115VAC, 220VAC (80VA)
Dimensions & weight	Approx. 275(W) x 220(H) x 370(D)mm Approx. 12 kg
Standard Accessories	Gas detection cassette tape, Dust filter, Fuse (3A)

Specifications subject to change without notice.

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